7/31/2010	12:48:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2010	12:48:47 PM	Recipe started at 12:48 PM
7/31/2010	12:48:47 PM	H2 valve closed
7/31/2010	12:48:47 PM	BCl3 valve closed
7/31/2010	12:48:47 PM	PH3 valve closed
7/31/2010	12:48:47 PM	SiCl4 pre valve closed
7/31/2010	12:48:47 PM	SiCl4 post valve closed
7/31/2010	12:48:47 PM	Main Vac valve closed
7/31/2010	12:48:47 PM	Bypass valve closed
7/31/2010	12:48:47 PM	Bubbler valve closed
7/31/2010	12:48:47 PM	Helium valve opened
7/31/2010	12:48:47 PM	Helium MFC set to  500.000000
7/31/2010	12:48:47 PM	H2 MFC set to  0.000000
7/31/2010	12:48:47 PM	BCl3 MFC set to  0.000000
7/31/2010	12:48:47 PM	PHl3 MFC set to  0.000000
7/31/2010	12:48:47 PM	SiCl4 MFC set to  0.000000
7/31/2010	12:48:47 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	12:48:47 PM	Tube furnace set to 0
7/31/2010	12:50:07 PM	Helium valve closed
7/31/2010	12:50:07 PM	H2 valve closed
7/31/2010	12:50:07 PM	BCl3 valve closed
7/31/2010	12:50:07 PM	PH3 valve closed
7/31/2010	12:50:07 PM	SiCl4 pre valve closed
7/31/2010	12:50:07 PM	SiCl4 post valve closed
7/31/2010	12:50:07 PM	Main Vac valve closed
7/31/2010	12:50:07 PM	Bypass valve closed
7/31/2010	12:50:07 PM	Bubbler valve closed
7/31/2010	12:50:07 PM	Helium MFC set to  0.000000
7/31/2010	12:50:07 PM	H2 MFC set to  0.000000
7/31/2010	12:50:07 PM	BCl3 MFC set to  0.000000
7/31/2010	12:50:07 PM	PHl3 MFC set to  0.000000
7/31/2010	12:50:07 PM	SiCl4 MFC set to  0.000000
7/31/2010	12:50:07 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	12:50:07 PM	Tube furnace set to 0
7/31/2010	12:50:07 PM	Run finished at 12:50 PM
7/31/2010	12:50:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2010	12:54:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2010	12:54:44 PM	Recipe started at 12:54 PM
7/31/2010	12:54:44 PM	Helium valve closed
7/31/2010	12:54:44 PM	H2 valve closed
7/31/2010	12:54:44 PM	BCl3 valve closed
7/31/2010	12:54:44 PM	PH3 valve closed
7/31/2010	12:54:44 PM	SiCl4 pre valve closed
7/31/2010	12:54:44 PM	SiCl4 post valve closed
7/31/2010	12:54:44 PM	Main Vac valve closed
7/31/2010	12:54:44 PM	Bubbler valve closed
7/31/2010	12:54:44 PM	Bypass valve opened
7/31/2010	12:54:44 PM	Helium MFC set to  0.000000
7/31/2010	12:54:44 PM	H2 MFC set to  0.000000
7/31/2010	12:54:44 PM	BCl3 MFC set to  0.000000
7/31/2010	12:54:44 PM	PHl3 MFC set to  0.000000
7/31/2010	12:54:44 PM	SiCl4 MFC set to  0.000000
7/31/2010	12:54:44 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	12:54:44 PM	Tube furnace set to 0
7/31/2010	12:55:22 PM	Helium valve closed
7/31/2010	12:55:22 PM	H2 valve closed
7/31/2010	12:55:22 PM	BCl3 valve closed
7/31/2010	12:55:22 PM	PH3 valve closed
7/31/2010	12:55:22 PM	SiCl4 pre valve closed
7/31/2010	12:55:22 PM	SiCl4 post valve closed
7/31/2010	12:55:22 PM	Bubbler valve closed
7/31/2010	12:55:22 PM	Main Vac valve opened
7/31/2010	12:55:22 PM	Bypass valve opened
7/31/2010	12:55:22 PM	Helium MFC set to  0.000000
7/31/2010	12:55:22 PM	H2 MFC set to  0.000000
7/31/2010	12:55:22 PM	BCl3 MFC set to  0.000000
7/31/2010	12:55:22 PM	PHl3 MFC set to  0.000000
7/31/2010	12:55:22 PM	SiCl4 MFC set to  0.000000
7/31/2010	12:55:22 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	12:55:22 PM	Tube furnace set to 0
7/31/2010	12:55:22 PM	Run finished at 12:55 PM
7/31/2010	12:55:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2010	12:57:13 PM	Helium valve opened
7/31/2010	12:57:17 PM	Helium MFC set to  100.000000
7/31/2010	12:58:34 PM	Helium valve closed
7/31/2010	12:58:42 PM	Tube furnace set to 100
7/31/2010	1:39:40 PM	Helium valve opened
7/31/2010	2:00:37 PM	Helium valve closed
7/31/2010	2:01:19 PM	Bypass valve closed
7/31/2010	2:01:20 PM	Main Vac valve closed
7/31/2010	2:01:25 PM	Main Vac valve opened
7/31/2010	2:01:26 PM	Bypass valve opened
7/31/2010	2:02:02 PM	Recipe started at 2:02 PM
7/31/2010	2:02:02 PM	Helium valve closed
7/31/2010	2:02:02 PM	BCl3 valve closed
7/31/2010	2:02:02 PM	PH3 valve closed
7/31/2010	2:02:02 PM	SiCl4 pre valve closed
7/31/2010	2:02:02 PM	SiCl4 post valve closed
7/31/2010	2:02:02 PM	Main Vac valve closed
7/31/2010	2:02:02 PM	Bypass valve closed
7/31/2010	2:02:02 PM	Bubbler valve closed
7/31/2010	2:02:02 PM	H2 valve opened
7/31/2010	2:02:02 PM	Helium MFC set to  0.000000
7/31/2010	2:02:02 PM	H2 MFC set to  500.000000
7/31/2010	2:02:02 PM	BCl3 MFC set to  0.000000
7/31/2010	2:02:02 PM	PHl3 MFC set to  0.000000
7/31/2010	2:02:02 PM	SiCl4 MFC set to  0.000000
7/31/2010	2:02:02 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	2:02:02 PM	Tube furnace set to 100
7/31/2010	2:03:22 PM	Helium valve closed
7/31/2010	2:03:22 PM	BCl3 valve closed
7/31/2010	2:03:22 PM	PH3 valve closed
7/31/2010	2:03:22 PM	SiCl4 pre valve closed
7/31/2010	2:03:22 PM	SiCl4 post valve closed
7/31/2010	2:03:22 PM	Main Vac valve closed
7/31/2010	2:03:22 PM	Bypass valve closed
7/31/2010	2:03:22 PM	H2 valve opened
7/31/2010	2:03:22 PM	Bubbler valve opened
7/31/2010	2:03:22 PM	Helium MFC set to  0.000000
7/31/2010	2:03:22 PM	H2 MFC set to  500.000000
7/31/2010	2:03:22 PM	BCl3 MFC set to  0.000000
7/31/2010	2:03:22 PM	PHl3 MFC set to  0.000000
7/31/2010	2:03:22 PM	SiCl4 MFC set to  0.000000
7/31/2010	2:03:22 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	2:03:22 PM	Tube furnace set to 1000
7/31/2010	2:23:22 PM	Helium valve closed
7/31/2010	2:23:22 PM	PH3 valve closed
7/31/2010	2:23:22 PM	Main Vac valve closed
7/31/2010	2:23:22 PM	Bypass valve closed
7/31/2010	2:23:22 PM	H2 valve opened
7/31/2010	2:23:22 PM	BCl3 valve opened
7/31/2010	2:23:22 PM	SiCl4 pre valve opened
7/31/2010	2:23:22 PM	SiCl4 post valve opened
7/31/2010	2:23:22 PM	Bubbler valve opened
7/31/2010	2:23:22 PM	Helium MFC set to  0.000000
7/31/2010	2:23:22 PM	H2 MFC set to  500.000000
7/31/2010	2:23:22 PM	BCl3 MFC set to  25.000000
7/31/2010	2:23:22 PM	PHl3 MFC set to  0.000000
7/31/2010	2:23:22 PM	SiCl4 MFC set to  50.000000
7/31/2010	2:23:22 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	2:23:22 PM	Tube furnace set to 1000
7/31/2010	2:29:22 PM	H2 valve closed
7/31/2010	2:29:22 PM	BCl3 valve closed
7/31/2010	2:29:22 PM	PH3 valve closed
7/31/2010	2:29:22 PM	SiCl4 pre valve closed
7/31/2010	2:29:22 PM	SiCl4 post valve closed
7/31/2010	2:29:22 PM	Main Vac valve closed
7/31/2010	2:29:22 PM	Bypass valve closed
7/31/2010	2:29:22 PM	Helium valve opened
7/31/2010	2:29:22 PM	Bubbler valve opened
7/31/2010	2:29:22 PM	Helium MFC set to  500.000000
7/31/2010	2:29:22 PM	H2 MFC set to  0.000000
7/31/2010	2:29:22 PM	BCl3 MFC set to  0.000000
7/31/2010	2:29:22 PM	PHl3 MFC set to  0.000000
7/31/2010	2:29:22 PM	SiCl4 MFC set to  0.000000
7/31/2010	2:29:22 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	2:29:22 PM	Tube furnace set to 0
7/31/2010	2:49:22 PM	Helium valve closed
7/31/2010	2:49:22 PM	H2 valve closed
7/31/2010	2:49:22 PM	BCl3 valve closed
7/31/2010	2:49:22 PM	PH3 valve closed
7/31/2010	2:49:22 PM	SiCl4 pre valve closed
7/31/2010	2:49:22 PM	SiCl4 post valve closed
7/31/2010	2:49:22 PM	Main Vac valve closed
7/31/2010	2:49:22 PM	Bypass valve closed
7/31/2010	2:49:22 PM	Bubbler valve closed
7/31/2010	2:49:22 PM	Helium MFC set to  0.000000
7/31/2010	2:49:22 PM	H2 MFC set to  0.000000
7/31/2010	2:49:22 PM	BCl3 MFC set to  0.000000
7/31/2010	2:49:22 PM	PHl3 MFC set to  0.000000
7/31/2010	2:49:22 PM	SiCl4 MFC set to  0.000000
7/31/2010	2:49:22 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	2:49:23 PM	Tube furnace set to 0
7/31/2010	2:49:23 PM	Run finished at 2:49 PM
7/31/2010	2:57:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2010	2:57:37 PM	Recipe started at 2:57 PM
7/31/2010	2:57:37 PM	H2 valve closed
7/31/2010	2:57:37 PM	BCl3 valve closed
7/31/2010	2:57:37 PM	PH3 valve closed
7/31/2010	2:57:37 PM	SiCl4 pre valve closed
7/31/2010	2:57:37 PM	SiCl4 post valve closed
7/31/2010	2:57:37 PM	Main Vac valve closed
7/31/2010	2:57:37 PM	Bypass valve closed
7/31/2010	2:57:37 PM	Bubbler valve closed
7/31/2010	2:57:37 PM	Helium valve opened
7/31/2010	2:57:37 PM	Helium MFC set to  500.000000
7/31/2010	2:57:37 PM	H2 MFC set to  0.000000
7/31/2010	2:57:37 PM	BCl3 MFC set to  0.000000
7/31/2010	2:57:37 PM	PHl3 MFC set to  0.000000
7/31/2010	2:57:37 PM	SiCl4 MFC set to  0.000000
7/31/2010	2:57:37 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	2:57:38 PM	Tube furnace set to 0
7/31/2010	2:57:38 PM	Helium valve closed
7/31/2010	2:57:38 PM	H2 valve closed
7/31/2010	2:57:38 PM	BCl3 valve closed
7/31/2010	2:57:38 PM	PH3 valve closed
7/31/2010	2:57:38 PM	SiCl4 pre valve closed
7/31/2010	2:57:38 PM	SiCl4 post valve closed
7/31/2010	2:57:38 PM	Main Vac valve closed
7/31/2010	2:57:38 PM	Bypass valve closed
7/31/2010	2:57:38 PM	Bubbler valve closed
7/31/2010	2:57:38 PM	Helium MFC set to  0.000000
7/31/2010	2:57:38 PM	H2 MFC set to  0.000000
7/31/2010	2:57:38 PM	BCl3 MFC set to  0.000000
7/31/2010	2:57:38 PM	PHl3 MFC set to  0.000000
7/31/2010	2:57:38 PM	SiCl4 MFC set to  0.000000
7/31/2010	2:57:38 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	2:57:38 PM	Tube furnace set to 0
7/31/2010	2:57:39 PM	Run finished at 2:57 PM
7/31/2010	2:57:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2010	3:01:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2010	3:01:08 PM	Recipe started at 3:01 PM
7/31/2010	3:01:08 PM	Helium valve closed
7/31/2010	3:01:08 PM	H2 valve closed
7/31/2010	3:01:08 PM	BCl3 valve closed
7/31/2010	3:01:08 PM	PH3 valve closed
7/31/2010	3:01:08 PM	SiCl4 pre valve closed
7/31/2010	3:01:08 PM	SiCl4 post valve closed
7/31/2010	3:01:08 PM	Main Vac valve closed
7/31/2010	3:01:08 PM	Bubbler valve closed
7/31/2010	3:01:08 PM	Bypass valve opened
7/31/2010	3:01:08 PM	Helium MFC set to  0.000000
7/31/2010	3:01:08 PM	H2 MFC set to  0.000000
7/31/2010	3:01:08 PM	BCl3 MFC set to  0.000000
7/31/2010	3:01:08 PM	PHl3 MFC set to  0.000000
7/31/2010	3:01:08 PM	SiCl4 MFC set to  0.000000
7/31/2010	3:01:08 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	3:01:08 PM	Tube furnace set to 0
7/31/2010	3:01:46 PM	Helium valve closed
7/31/2010	3:01:46 PM	H2 valve closed
7/31/2010	3:01:46 PM	BCl3 valve closed
7/31/2010	3:01:46 PM	PH3 valve closed
7/31/2010	3:01:46 PM	SiCl4 pre valve closed
7/31/2010	3:01:46 PM	SiCl4 post valve closed
7/31/2010	3:01:46 PM	Bubbler valve closed
7/31/2010	3:01:46 PM	Main Vac valve opened
7/31/2010	3:01:46 PM	Bypass valve opened
7/31/2010	3:01:46 PM	Helium MFC set to  0.000000
7/31/2010	3:01:46 PM	H2 MFC set to  0.000000
7/31/2010	3:01:46 PM	BCl3 MFC set to  0.000000
7/31/2010	3:01:46 PM	PHl3 MFC set to  0.000000
7/31/2010	3:01:46 PM	SiCl4 MFC set to  0.000000
7/31/2010	3:01:46 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	3:01:46 PM	Tube furnace set to 0
7/31/2010	3:01:46 PM	Run finished at 3:01 PM
7/31/2010	3:01:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2010	3:31:27 PM	Helium valve opened
7/31/2010	3:31:29 PM	Helium MFC set to  100.000000
7/31/2010	3:54:44 PM	Helium valve closed
7/31/2010	3:54:49 PM	Helium MFC set to  100.000000
7/31/2010	4:03:10 PM	Bypass valve closed
7/31/2010	4:03:10 PM	Main Vac valve closed
7/31/2010	4:03:15 PM	Main Vac valve opened
7/31/2010	4:03:15 PM	Bypass valve opened
7/31/2010	4:03:25 PM	Recipe started at 4:03 PM
7/31/2010	4:03:25 PM	Helium valve closed
7/31/2010	4:03:25 PM	BCl3 valve closed
7/31/2010	4:03:25 PM	PH3 valve closed
7/31/2010	4:03:25 PM	SiCl4 pre valve closed
7/31/2010	4:03:25 PM	SiCl4 post valve closed
7/31/2010	4:03:25 PM	Main Vac valve closed
7/31/2010	4:03:25 PM	Bypass valve closed
7/31/2010	4:03:25 PM	Bubbler valve closed
7/31/2010	4:03:25 PM	H2 valve opened
7/31/2010	4:03:25 PM	Helium MFC set to  0.000000
7/31/2010	4:03:25 PM	H2 MFC set to  500.000000
7/31/2010	4:03:25 PM	BCl3 MFC set to  0.000000
7/31/2010	4:03:25 PM	PHl3 MFC set to  0.000000
7/31/2010	4:03:25 PM	SiCl4 MFC set to  0.000000
7/31/2010	4:03:25 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	4:03:25 PM	Tube furnace set to 100
7/31/2010	4:04:44 PM	Helium valve closed
7/31/2010	4:04:44 PM	BCl3 valve closed
7/31/2010	4:04:44 PM	PH3 valve closed
7/31/2010	4:04:44 PM	SiCl4 pre valve closed
7/31/2010	4:04:44 PM	SiCl4 post valve closed
7/31/2010	4:04:44 PM	Main Vac valve closed
7/31/2010	4:04:44 PM	Bypass valve closed
7/31/2010	4:04:44 PM	H2 valve opened
7/31/2010	4:04:44 PM	Bubbler valve opened
7/31/2010	4:04:44 PM	Helium MFC set to  0.000000
7/31/2010	4:04:44 PM	H2 MFC set to  500.000000
7/31/2010	4:04:44 PM	BCl3 MFC set to  0.000000
7/31/2010	4:04:44 PM	PHl3 MFC set to  0.000000
7/31/2010	4:04:44 PM	SiCl4 MFC set to  0.000000
7/31/2010	4:04:44 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	4:04:44 PM	Tube furnace set to 1000
7/31/2010	4:24:44 PM	Helium valve closed
7/31/2010	4:24:44 PM	PH3 valve closed
7/31/2010	4:24:44 PM	Main Vac valve closed
7/31/2010	4:24:44 PM	Bypass valve closed
7/31/2010	4:24:44 PM	H2 valve opened
7/31/2010	4:24:44 PM	BCl3 valve opened
7/31/2010	4:24:44 PM	SiCl4 pre valve opened
7/31/2010	4:24:44 PM	SiCl4 post valve opened
7/31/2010	4:24:44 PM	Bubbler valve opened
7/31/2010	4:24:44 PM	Helium MFC set to  0.000000
7/31/2010	4:24:44 PM	H2 MFC set to  500.000000
7/31/2010	4:24:44 PM	BCl3 MFC set to  35.000000
7/31/2010	4:24:44 PM	PHl3 MFC set to  0.000000
7/31/2010	4:24:44 PM	SiCl4 MFC set to  50.000000
7/31/2010	4:24:44 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	4:24:44 PM	Tube furnace set to 1000
7/31/2010	4:30:44 PM	H2 valve closed
7/31/2010	4:30:44 PM	BCl3 valve closed
7/31/2010	4:30:44 PM	PH3 valve closed
7/31/2010	4:30:44 PM	SiCl4 pre valve closed
7/31/2010	4:30:44 PM	SiCl4 post valve closed
7/31/2010	4:30:44 PM	Main Vac valve closed
7/31/2010	4:30:44 PM	Bypass valve closed
7/31/2010	4:30:44 PM	Helium valve opened
7/31/2010	4:30:44 PM	Bubbler valve opened
7/31/2010	4:30:44 PM	Helium MFC set to  500.000000
7/31/2010	4:30:44 PM	H2 MFC set to  0.000000
7/31/2010	4:30:44 PM	BCl3 MFC set to  0.000000
7/31/2010	4:30:44 PM	PHl3 MFC set to  0.000000
7/31/2010	4:30:44 PM	SiCl4 MFC set to  0.000000
7/31/2010	4:30:44 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	4:30:44 PM	Tube furnace set to 0
7/31/2010	4:50:44 PM	Helium valve closed
7/31/2010	4:50:44 PM	H2 valve closed
7/31/2010	4:50:44 PM	BCl3 valve closed
7/31/2010	4:50:44 PM	PH3 valve closed
7/31/2010	4:50:44 PM	SiCl4 pre valve closed
7/31/2010	4:50:44 PM	SiCl4 post valve closed
7/31/2010	4:50:44 PM	Main Vac valve closed
7/31/2010	4:50:44 PM	Bypass valve closed
7/31/2010	4:50:44 PM	Bubbler valve closed
7/31/2010	4:50:44 PM	Helium MFC set to  0.000000
7/31/2010	4:50:44 PM	H2 MFC set to  0.000000
7/31/2010	4:50:44 PM	BCl3 MFC set to  0.000000
7/31/2010	4:50:44 PM	PHl3 MFC set to  0.000000
7/31/2010	4:50:44 PM	SiCl4 MFC set to  0.000000
7/31/2010	4:50:44 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	4:50:45 PM	Tube furnace set to 0
7/31/2010	4:50:45 PM	Run finished at 4:50 PM
7/31/2010	5:08:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2010	5:08:12 PM	Recipe started at 5:08 PM
7/31/2010	5:08:12 PM	Helium valve closed
7/31/2010	5:08:12 PM	H2 valve closed
7/31/2010	5:08:12 PM	BCl3 valve closed
7/31/2010	5:08:12 PM	PH3 valve closed
7/31/2010	5:08:12 PM	SiCl4 pre valve closed
7/31/2010	5:08:12 PM	SiCl4 post valve closed
7/31/2010	5:08:12 PM	Main Vac valve closed
7/31/2010	5:08:12 PM	Bubbler valve closed
7/31/2010	5:08:12 PM	Bypass valve opened
7/31/2010	5:08:12 PM	Helium MFC set to  0.000000
7/31/2010	5:08:12 PM	H2 MFC set to  0.000000
7/31/2010	5:08:12 PM	BCl3 MFC set to  0.000000
7/31/2010	5:08:12 PM	PHl3 MFC set to  0.000000
7/31/2010	5:08:12 PM	SiCl4 MFC set to  0.000000
7/31/2010	5:08:12 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	5:08:12 PM	Tube furnace set to 0
7/31/2010	5:08:50 PM	Helium valve closed
7/31/2010	5:08:50 PM	H2 valve closed
7/31/2010	5:08:50 PM	BCl3 valve closed
7/31/2010	5:08:50 PM	PH3 valve closed
7/31/2010	5:08:50 PM	SiCl4 pre valve closed
7/31/2010	5:08:50 PM	SiCl4 post valve closed
7/31/2010	5:08:50 PM	Bubbler valve closed
7/31/2010	5:08:50 PM	Main Vac valve opened
7/31/2010	5:08:50 PM	Bypass valve opened
7/31/2010	5:08:50 PM	Helium MFC set to  0.000000
7/31/2010	5:08:50 PM	H2 MFC set to  0.000000
7/31/2010	5:08:50 PM	BCl3 MFC set to  0.000000
7/31/2010	5:08:50 PM	PHl3 MFC set to  0.000000
7/31/2010	5:08:50 PM	SiCl4 MFC set to  0.000000
7/31/2010	5:08:50 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	5:08:50 PM	Tube furnace set to 0
7/31/2010	5:08:50 PM	Run finished at 5:08 PM
7/31/2010	5:08:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2010	5:28:06 PM	Helium valve opened
7/31/2010	5:28:08 PM	Helium MFC set to  100.000000
7/31/2010	5:31:57 PM	Helium valve closed
7/31/2010	6:03:59 PM	Helium valve opened
7/31/2010	6:06:33 PM	Helium valve closed
7/31/2010	6:07:21 PM	Bypass valve closed
7/31/2010	6:07:21 PM	Main Vac valve closed
7/31/2010	6:07:27 PM	Main Vac valve opened
7/31/2010	6:07:27 PM	Bypass valve opened
7/31/2010	6:08:04 PM	Recipe started at 6:08 PM
7/31/2010	6:08:04 PM	Helium valve closed
7/31/2010	6:08:04 PM	BCl3 valve closed
7/31/2010	6:08:04 PM	PH3 valve closed
7/31/2010	6:08:04 PM	SiCl4 pre valve closed
7/31/2010	6:08:04 PM	SiCl4 post valve closed
7/31/2010	6:08:04 PM	Main Vac valve closed
7/31/2010	6:08:04 PM	Bypass valve closed
7/31/2010	6:08:04 PM	Bubbler valve closed
7/31/2010	6:08:04 PM	H2 valve opened
7/31/2010	6:08:04 PM	Helium MFC set to  0.000000
7/31/2010	6:08:04 PM	H2 MFC set to  500.000000
7/31/2010	6:08:04 PM	BCl3 MFC set to  0.000000
7/31/2010	6:08:04 PM	PHl3 MFC set to  0.000000
7/31/2010	6:08:04 PM	SiCl4 MFC set to  0.000000
7/31/2010	6:08:04 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	6:08:05 PM	Tube furnace set to 100
7/31/2010	6:09:24 PM	Helium valve closed
7/31/2010	6:09:24 PM	BCl3 valve closed
7/31/2010	6:09:24 PM	PH3 valve closed
7/31/2010	6:09:24 PM	SiCl4 pre valve closed
7/31/2010	6:09:24 PM	SiCl4 post valve closed
7/31/2010	6:09:24 PM	Main Vac valve closed
7/31/2010	6:09:24 PM	Bypass valve closed
7/31/2010	6:09:24 PM	H2 valve opened
7/31/2010	6:09:24 PM	Bubbler valve opened
7/31/2010	6:09:24 PM	Helium MFC set to  0.000000
7/31/2010	6:09:24 PM	H2 MFC set to  500.000000
7/31/2010	6:09:24 PM	BCl3 MFC set to  0.000000
7/31/2010	6:09:24 PM	PHl3 MFC set to  0.000000
7/31/2010	6:09:24 PM	SiCl4 MFC set to  0.000000
7/31/2010	6:09:24 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	6:09:24 PM	Tube furnace set to 1000
7/31/2010	6:29:24 PM	Helium valve closed
7/31/2010	6:29:24 PM	PH3 valve closed
7/31/2010	6:29:24 PM	Main Vac valve closed
7/31/2010	6:29:24 PM	Bypass valve closed
7/31/2010	6:29:24 PM	H2 valve opened
7/31/2010	6:29:24 PM	BCl3 valve opened
7/31/2010	6:29:24 PM	SiCl4 pre valve opened
7/31/2010	6:29:24 PM	SiCl4 post valve opened
7/31/2010	6:29:24 PM	Bubbler valve opened
7/31/2010	6:29:24 PM	Helium MFC set to  0.000000
7/31/2010	6:29:24 PM	H2 MFC set to  500.000000
7/31/2010	6:29:24 PM	BCl3 MFC set to  45.000000
7/31/2010	6:29:24 PM	PHl3 MFC set to  0.000000
7/31/2010	6:29:24 PM	SiCl4 MFC set to  50.000000
7/31/2010	6:29:24 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	6:29:24 PM	Tube furnace set to 1000
7/31/2010	6:35:24 PM	H2 valve closed
7/31/2010	6:35:24 PM	BCl3 valve closed
7/31/2010	6:35:24 PM	PH3 valve closed
7/31/2010	6:35:24 PM	SiCl4 pre valve closed
7/31/2010	6:35:24 PM	SiCl4 post valve closed
7/31/2010	6:35:24 PM	Main Vac valve closed
7/31/2010	6:35:24 PM	Bypass valve closed
7/31/2010	6:35:24 PM	Helium valve opened
7/31/2010	6:35:24 PM	Bubbler valve opened
7/31/2010	6:35:24 PM	Helium MFC set to  500.000000
7/31/2010	6:35:24 PM	H2 MFC set to  0.000000
7/31/2010	6:35:24 PM	BCl3 MFC set to  0.000000
7/31/2010	6:35:24 PM	PHl3 MFC set to  0.000000
7/31/2010	6:35:24 PM	SiCl4 MFC set to  0.000000
7/31/2010	6:35:24 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	6:35:24 PM	Tube furnace set to 0
7/31/2010	6:55:24 PM	Helium valve closed
7/31/2010	6:55:24 PM	H2 valve closed
7/31/2010	6:55:24 PM	BCl3 valve closed
7/31/2010	6:55:24 PM	PH3 valve closed
7/31/2010	6:55:24 PM	SiCl4 pre valve closed
7/31/2010	6:55:24 PM	SiCl4 post valve closed
7/31/2010	6:55:24 PM	Main Vac valve closed
7/31/2010	6:55:24 PM	Bypass valve closed
7/31/2010	6:55:24 PM	Bubbler valve closed
7/31/2010	6:55:24 PM	Helium MFC set to  0.000000
7/31/2010	6:55:24 PM	H2 MFC set to  0.000000
7/31/2010	6:55:24 PM	BCl3 MFC set to  0.000000
7/31/2010	6:55:24 PM	PHl3 MFC set to  0.000000
7/31/2010	6:55:24 PM	SiCl4 MFC set to  0.000000
7/31/2010	6:55:24 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	6:55:24 PM	Tube furnace set to 0
7/31/2010	6:55:25 PM	Run finished at 6:55 PM
7/31/2010	8:41:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2010	8:41:58 PM	Recipe started at 8:41 PM
7/31/2010	8:41:58 PM	Helium valve closed
7/31/2010	8:41:58 PM	H2 valve closed
7/31/2010	8:41:58 PM	BCl3 valve closed
7/31/2010	8:41:58 PM	PH3 valve closed
7/31/2010	8:41:58 PM	SiCl4 pre valve closed
7/31/2010	8:41:58 PM	SiCl4 post valve closed
7/31/2010	8:41:58 PM	Main Vac valve closed
7/31/2010	8:41:58 PM	Bubbler valve closed
7/31/2010	8:41:58 PM	Bypass valve opened
7/31/2010	8:41:58 PM	Helium MFC set to  0.000000
7/31/2010	8:41:58 PM	H2 MFC set to  0.000000
7/31/2010	8:41:58 PM	BCl3 MFC set to  0.000000
7/31/2010	8:41:58 PM	PHl3 MFC set to  0.000000
7/31/2010	8:41:58 PM	SiCl4 MFC set to  0.000000
7/31/2010	8:41:58 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	8:41:58 PM	Tube furnace set to 0
7/31/2010	8:42:36 PM	Helium valve closed
7/31/2010	8:42:36 PM	H2 valve closed
7/31/2010	8:42:36 PM	BCl3 valve closed
7/31/2010	8:42:36 PM	PH3 valve closed
7/31/2010	8:42:36 PM	SiCl4 pre valve closed
7/31/2010	8:42:36 PM	SiCl4 post valve closed
7/31/2010	8:42:36 PM	Bubbler valve closed
7/31/2010	8:42:36 PM	Main Vac valve opened
7/31/2010	8:42:36 PM	Bypass valve opened
7/31/2010	8:42:36 PM	Helium MFC set to  0.000000
7/31/2010	8:42:36 PM	H2 MFC set to  0.000000
7/31/2010	8:42:36 PM	BCl3 MFC set to  0.000000
7/31/2010	8:42:36 PM	PHl3 MFC set to  0.000000
7/31/2010	8:42:36 PM	SiCl4 MFC set to  0.000000
7/31/2010	8:42:36 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	8:42:36 PM	Tube furnace set to 0
7/31/2010	8:42:36 PM	Run finished at 8:42 PM
7/31/2010	8:42:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2010	8:43:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2010	8:43:44 PM	Recipe started at 8:43 PM
7/31/2010	8:43:44 PM	H2 valve closed
7/31/2010	8:43:44 PM	BCl3 valve closed
7/31/2010	8:43:44 PM	PH3 valve closed
7/31/2010	8:43:44 PM	SiCl4 pre valve closed
7/31/2010	8:43:44 PM	SiCl4 post valve closed
7/31/2010	8:43:44 PM	Main Vac valve closed
7/31/2010	8:43:44 PM	Bypass valve closed
7/31/2010	8:43:44 PM	Bubbler valve closed
7/31/2010	8:43:44 PM	Helium valve opened
7/31/2010	8:43:44 PM	Helium MFC set to  500.000000
7/31/2010	8:43:44 PM	H2 MFC set to  0.000000
7/31/2010	8:43:44 PM	BCl3 MFC set to  0.000000
7/31/2010	8:43:44 PM	PHl3 MFC set to  0.000000
7/31/2010	8:43:44 PM	SiCl4 MFC set to  0.000000
7/31/2010	8:43:44 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	8:43:44 PM	Tube furnace set to 0
7/31/2010	8:44:20 PM	Helium valve closed
7/31/2010	8:44:20 PM	H2 valve closed
7/31/2010	8:44:20 PM	BCl3 valve closed
7/31/2010	8:44:20 PM	PH3 valve closed
7/31/2010	8:44:20 PM	SiCl4 pre valve closed
7/31/2010	8:44:20 PM	SiCl4 post valve closed
7/31/2010	8:44:20 PM	Main Vac valve closed
7/31/2010	8:44:20 PM	Bypass valve closed
7/31/2010	8:44:20 PM	Bubbler valve closed
7/31/2010	8:44:20 PM	Helium MFC set to  0.000000
7/31/2010	8:44:20 PM	H2 MFC set to  0.000000
7/31/2010	8:44:20 PM	BCl3 MFC set to  0.000000
7/31/2010	8:44:20 PM	PHl3 MFC set to  0.000000
7/31/2010	8:44:20 PM	SiCl4 MFC set to  0.000000
7/31/2010	8:44:20 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	8:44:20 PM	Tube furnace set to 0
7/31/2010	8:44:20 PM	Run finished at 8:44 PM
7/31/2010	8:44:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2010	8:44:30 PM	Bypass valve opened
7/31/2010	8:44:38 PM	Bypass valve closed
7/31/2010	8:44:39 PM	Main Vac valve opened
7/31/2010	8:44:40 PM	Main Vac valve closed
7/31/2010	8:44:41 PM	Main Vac valve opened
7/31/2010	8:44:42 PM	Main Vac valve closed
7/31/2010	8:52:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2010	8:52:47 PM	Recipe started at 8:52 PM
7/31/2010	8:52:47 PM	Helium valve closed
7/31/2010	8:52:47 PM	H2 valve closed
7/31/2010	8:52:47 PM	BCl3 valve closed
7/31/2010	8:52:47 PM	PH3 valve closed
7/31/2010	8:52:47 PM	SiCl4 pre valve closed
7/31/2010	8:52:47 PM	SiCl4 post valve closed
7/31/2010	8:52:47 PM	Main Vac valve closed
7/31/2010	8:52:47 PM	Bubbler valve closed
7/31/2010	8:52:47 PM	Bypass valve opened
7/31/2010	8:52:47 PM	Helium MFC set to  0.000000
7/31/2010	8:52:47 PM	H2 MFC set to  0.000000
7/31/2010	8:52:47 PM	BCl3 MFC set to  0.000000
7/31/2010	8:52:47 PM	PHl3 MFC set to  0.000000
7/31/2010	8:52:47 PM	SiCl4 MFC set to  0.000000
7/31/2010	8:52:47 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	8:52:47 PM	Tube furnace set to 0
7/31/2010	8:53:32 PM	Helium valve closed
7/31/2010	8:53:32 PM	H2 valve closed
7/31/2010	8:53:32 PM	BCl3 valve closed
7/31/2010	8:53:32 PM	PH3 valve closed
7/31/2010	8:53:32 PM	SiCl4 pre valve closed
7/31/2010	8:53:32 PM	SiCl4 post valve closed
7/31/2010	8:53:32 PM	Bubbler valve closed
7/31/2010	8:53:32 PM	Main Vac valve opened
7/31/2010	8:53:32 PM	Bypass valve opened
7/31/2010	8:53:32 PM	Helium MFC set to  0.000000
7/31/2010	8:53:32 PM	H2 MFC set to  0.000000
7/31/2010	8:53:32 PM	BCl3 MFC set to  0.000000
7/31/2010	8:53:32 PM	PHl3 MFC set to  0.000000
7/31/2010	8:53:32 PM	SiCl4 MFC set to  0.000000
7/31/2010	8:53:32 PM	Bypass solenoid MFC set to  0.000000
7/31/2010	8:53:32 PM	Tube furnace set to 0
7/31/2010	8:53:32 PM	Run finished at 8:53 PM
7/31/2010	8:53:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
